摘要: 本文中总结了纳米 α-Fe₂O₃ 气敏粉体与薄膜制备技术的最新 研究进展, 综述了近几年气敏型 α-Fe₂O₃ 纳米粉体及薄膜的制备技 术, 就灵敏度低、选择性差、性能不够稳定等 α-Fe₂O₃ 气敏材料及元件 研究中存在的问题进行了探讨, 指出必须在材料制备过程中通过控 制粉体颗粒大小、掺杂、采用双层膜技术等改善其微观结构, 才能提 高材料的气敏性能。 

关键词: 气敏材料; 粉体; 薄膜; 制备技术

Abstract: In order to summarize new research development on prepara tion technologies of nano-sized α-Fe₂O₃ gas powder and film, advances in the study on preparation technologies of α-Fe₂O₃ gas sensing material were reviewed. The problems are focused on the low sensitivity, poor se-lectivity and stability of the sensors. It is presented that the problems could be resolved by controlling the size of the grain, doping, preparing multilayer thin film and so on. 

Keywords: gas sensing material; powder; film; preparation technology