摘要：用钇稳定氧化锆球为研磨介质，用研磨筒内壁和搅拌器都衬以聚 氨酯的搅拌磨制备了电子级高纯超细环氧塑封料用石英微粉， 研究了 石英微粉特征参数 d50 随搅拌粉磨时间延长的变化规律，考察了钇稳定 氧化锆球对石英微粉的污染大小，分析和探讨了 1 μm 以下超细石英 微粉的化学成分和形貌特征。实验证明，用该搅拌磨磨细石英砂可获得 1 μm 以下、SiO₂ 的质量分数达到 99.91%的高纯超细石英微粉，但难以 获得球形石英微粉。 

关键词：搅拌磨；石英微粉；环氧塑封料

Abstract：Utilizing yttrial-stabilized zirconia balls as grinding medium， the agitator mill whose grinding tube interior and agitator lined with the polyester plastics was used to prepare electron grade superfine quartz powder with high-purity and crystalline by grinding quartz sand. The changing law of the special parameters of superfine quartz powder with the variations of grinding time of the agitator mill，contamination level of yttrial-stabilized zirconia balls on the superfine quartz powder， and the chemical composition and microcosmic shape of the superfine quartz particles which was smaller than 1 μm were discussed. The results showed that the superfine quartz particles below 1 μm and with SiO₂content of 99.91% could be obtained，but it was very difficult to achieve the spherical superfine quartz particles by grinding the quartz sand in agi tator mill. 

Keywords：agitator mill； superfine quartz powder； polyester plastics