摘要：本文采用激光诱导大分子有机硅熔（ＨＭＤＳ）气相反应，通过加入附加反应气和工艺参数的优化控制，在不同合成条件下制得单相非晶Ｓｉ_３Ｎ_４，β—ＳｉＣ纳米粉和宽组份变化范围的ＳｉＮＸＣＹ纳米复合粉（平均粒径：１０－３０ｎｍ）。与通常采用的硅烷相比，采用此有机硅烷激光合成在等同实验条件下粉产率可提高３－５倍．成本降低１倍，且具有粉体组成，结构易于控制等优点，是一种具有商业化应用前景的高性能硅基纳米陶瓷粉制备技术。

关键词：硅基纳米陶瓷粉；有机硅烷；激光合成

Abstract：Si-base ceramic nano-powders including Si₃N₄，SiC,Si₃N₄-SiC have been successfully prepared from hexamethyldisilazane(HMDS) and NH or H, by CO₂, laser induced gas phasereaction with high一yield. The cost decrease by 6-10 times using HMDS as the raw ma-terial compared · with SiHand the chemical composition，size, structure of powderswere controlled easily. This synthesis technology can be applied in ceramic nano - powdersindustry in the recent times.

Keywords : Nano一powders of Si-base ceramic. laser synthesis.