济南大学 材料科学与工程学院，山东 济南 250022
引用格式：徐红燕，李根. 基于纳米WO3半导体材料的H2气体传感器的研究现状［J］. 中国粉体技术，2024，30（5）：9-20.
XU H Y， LI G. Research status of H2 gas sensors based on nano WO3 semiconductor materials［J］. China Powder Science and Technology，2024，30（5）：9−20.
DOI：10.13732/j.issn.1008-5548.2024.05.002
收稿日期：2024-05-14，修回日期：2024-07-09，上线日期：2024-08-29。
基金项目：国家自然科学基金面上项目，编号 ：62171199。
第一作者简介：徐红燕（1976—），女，教授，博士，博士生导师，研究方向为新型半导体气敏材料及其传感器。E-mail：mse_xuhy@ujn.edu. cn。
摘要：【目的】 梳理对氢气气体响应快、灵敏度高的气体传感器研究现状，为研究高灵敏度、高选择性、易制备的H2气体传感器提供新思路。【研究现状】纳米WO3材料作为N型半导体，具有宽带隙、热稳定性高、易合成等优点，广泛应用于气体传感器领域； WO3基氢气传感器发展迅速，综述近年来国内外WO3基氢气传感器的研究成果，概括WO3材料氢气传感器制备技术、形貌特征、气敏性能的研究成果，总结上述成果的优势与现阶段的局限性； WO3纳米材料由于独特的结构特性，存在多种方式提高其性能，包含形貌控制、异质结构筑、贵金属掺杂；重点阐述 WO3纳米材料不同调整修饰技术的基本原理与研究进展。【展望】对WO3基氢气传感器的发展趋势进行展望与分析，提升性能的方式灵活多样，制备出的传感器气敏性能优异，WO3基氢气传感器在未来具有深厚的发展潜力。
Significance As an n-type semiconductor， WO3 is widely used in the field of gas sensors due to its wide band gap， high thermal stability， and easy synthesis. Given the importance of monitoring hydrogen concentration in ensuring the safety of industrial production and daily life， it is crucial to develop gas sensors that achieve both rapid response and high sensitivity to hydrogen.
Progress WO3 materials are known for their flexible structural properties， which can improve gas sensing performance through various approaches， such as noble metal catalysis and heterostructure construction. Doping WO3 with noble metals such as palladium and platinum and constructing heterojunctions with other semiconductors are strategies that have been proved to significantly enhance hydrogen selectivity and sensitivity. This paper reviews the current research and future prospects of hydrogen sensors， focusing on four areas： preparation methods， morphological characteristics， gas-sensing performance， and mechanisms.Sensor materials are prepared using methods such as hydrothermal synthesis， sol-gel processes， radio frequency magnetron sputtering （RFMS）， and glancing angle deposition （GLAD）. These materials are then characterized using scanning electron microscopy （SEM）， transmission electron microscopy （TEM）， and X-ray diffraction （XRD）， and their gas-sensitive properties are evaluated using various instruments. Consequently， the underlying mechanisms are explained scientifically and precisely.
Conclusion and Prospects WO3 is one of the most promising materials in the field of sensing technology and has become a focal point of research in recent years. This paper reviews the preparation methods of WO3 nanomaterials and their composites， as well as the current research advancements in H2 gas detection. The morphology of metal oxides has a significant impact on gas-sensing performance. The specific surface areas and exposed crystal surfaces of WO3 vary with different morphologies， resulting in differences in contact areas and active sites for target gases. Thus， the preparation of WO3 materials with distinct morphologies has become a crucial area of research. One of the most common methods for improving gas-sensing performance is the introduction of noble metal doping. This can be achieved through chemical and electronic sensitization， which enhances sensor response. The strong coupling effect between specific metals and certain gases also improves sensor selectivity and reduces operating temperature. The dissociation of hydrogen atoms by platinum at room temperature greatly reduces the operating temperature of the sensor. Also， doping palladium into tungsten trioxide， a semiconductor， significantly enhances hydrogen detection.Studies have demonstrated that compared to pure WO3， palladium doping significantly improves hydrogen detection. Overall，the doping of noble metals and the construction of heterojunctions can reduce operating temperature， enhance sensitivity， reduce the detection limit， and shorten the recovery and response times， making these strategies highly effective compared to using onlypure phase WO3 semiconductor materials.
Keywords：gas sensor； oxide semiconductor； tungsten trioxide
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