引用格式：

徐骏， 胡申. 多孔材料吸附分离氟代烃的研究进展［J］. 中国粉体技术， 2026， 32（1）： 1-13.

XU Jun， HU Shen. Research progress on adsorption and separation of fluorohydrocarbons by porous materials［J］. China Powder Science and Technology， 2026， 32（1）： 1-13.

DOI：10.13732/j.issn.1008-5548.2026.01.001

收稿日期： 2025-02-25， 修回日期： 2025-05-03， 上线日期： 2025-07-02。

基金项目： 国家自然科学基金项目，编号：22471128。

第一作者简介： 徐骏（1985—），男，副教授，博士，天津市青年千人，研究方向为多孔材料的固体核磁共振研究。E-mail：junxu@nankai.edu.cn。

摘要： 【目的】 为了突破限制我国半导体产业发展的关键“卡脖子”问题——电子特种气体（特气）的高效、低成本生产，开展多孔材料吸附分离氟代烃的研究，实现关键氟代烃体系的提纯。【研究现状】 多孔材料吸附分离具有操作简单、条件温和、对痕量杂质去除效率高等优点，能够满足氟代烃电子特气的现有纯度要求，多孔材料吸附分离法可以在较低能耗的情况下获得高纯度的氟代烃；总结通过活性炭、碳分子筛、金属有机框架等多孔材料对CF₄、C₂F₆、C₃F₈等氟代烃体系进行吸附分离的最新研究进展。【结论与展望】 多孔材料在单组分的吸附量和混合气体的选择性2项关键参数上能够取得良好的效果；理论计算为寻找合适的多孔材料吸附剂提供了指导，理论计算的工作重点集中于四氟化碳分离体系，缺少针对双碳或多碳氟代烃分离体系的研究；目前已有一些国内外学者尝试将多孔材料用于氟代烃电子特气的工业化生产，但还处于比较初级的阶段；提出后续研究需加强与理论计算的结合，实现多孔材料的理性设计与选择，同时应逐渐偏向于工业生产背景，实现多孔材料吸附分离氟代烃的工业应用。

关键词： 氟代烃； 多孔材料； 分离纯化； 吸附； 电子特气

Abstract

Significance To address the key "bottleneck" problem hindering the development of China's semiconductor industry， namely the efficient and cost-effective production of electronic specialty gases （ESG）， studies have been conducted on the adsorption and separation of fluorohydrocarbons using porous materials， aiming to achieve the purification of key fluorohydrocarbon systems. Customized porous adsorbents have been developed to address the low efficiency and excessive energy consumption associated with traditional distillation methods. Through material design and process optimization， an efficient separation system is established， facilitating large-scale domestic production of ESG for semiconductor manufacturing in China.

Progress Distillation， a traditional purification method， exhibits limitations in separating impurities from fluorohydrocarbons with similar boiling points， making it extremely difficult to achieve the ultra-high purity （5N， exceeding 99.999%） demanded by ESG standards. Additionally， the process faces challenges such as high energy consumption and substantial investment costs， highlighting the urgent need to develop alternative separation and purification technologies， particularly porous material-based methods. Studies have shown that porous materials are exceptional in two critical aspects： selective gas separation and high-capacity single-component adsorption. Their tunable pore structures and customizable surface chemistries enable precise molecular recognition， allowing efficient isolation of target compounds from complex gas mixtures with remarkable selectivity. In addition to separation performance， these materials also exhibit outstanding adsorption capacities for individual components， making them versatile for applications ranging from gas purification to storage. Recent studies have further evaluated their long-term stability and regeneration potential， with studies confirming that many porous materials maintain adsorption efficiency over multiple cycles while preserving structural integrity. This robust combination of high selectivity， large adsorption capacity， and cycling stability positions porous materials as ideal candidates for sustainable industrial processes， including carbon capture， hydrogen storage， and high-value chemical recovery. This review summarizes recent advancements in the porous material-based adsorption and separation of key fluorohydrocarbons， including CF₄， C₂F₆， and C₃F_8， focusing on activated carbon， carbon molecular sieves， and metal-organic frameworks （MOFs）.

Conclusions and Prospects Porous material-based adsorption and separation technology is well-suited for the purification of fluorohydrocarbon ESG due to its operational simplicity， mild processing conditions， and high efficiency in removing trace impurities. This technology not only meets the current purity requirements for ESG but also exhibits strong potential to achieve even higher purity levels. Research has shown that porous materials can achieve favorable outcomes in two key parameters： single-component adsorption and gas mixture selectivity. In addition， some studies have confirmed the excellent stability and recyclability of these materials. Future research should focus on the computational-guided rational design of porous materials to optimize their adsorption capacity and selectivity. Also， experimental validations under actual industrial operating conditions should be conducted to ensure that these adsorptive gas separation technologies are scalable and economically feasible. Special attention should be paid to their long-term stability and reusability under diverse operating conditions. With rising industrial demands， enhancing regeneration efficiency and maximizing the operational durability of porous adsorbents will emerge as critical research priorities. To promote sustainable implementation， material development strategies should also incorporate in-depth analyses of the environmental impact and economic viability. Consequently， subsequent research endeavors should address three key areas： material performance， technological reliability， and sustainability. Such a multidimensional strategy is crucial for ensuring the long-term stability， durability， and efficiency of porous material-based purification technologies in industrial applications. Ultimately， these technologies are poised to play a pivotal role in the industrial production of high-purity fluorohydrocarbons， driving innovative development across industries.

Keywords： fluorohydrocarbons； porous materials； separation and purification； adsorption； electronic specialty gases

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