摘要：用粒子计数器在洁净室中采样 ,采样误差可包括非等速采样的误差、采样管中微粒沉积的误差、粒子计数器的计数和采样流量误差,分别约为 -5%、-3%、-35%和±3% ,结果引起计数器采样的综合误差约为72%。

关键词：粒子计数器;气溶胶;误差;

Abstract：When aerosol is sampled by a particle counter in cleanroom，it has some sampling error‚inclusive of non－isoki-netic sampling error‚deposition sampling error in a sampling tube‚counting error and error of sampling rate in a particle counter which is －5％，－3％，－3．5％ and ±3％ respectively．It can result in a compositive error about 7．2％ in a particle counter． 

Key words：particle counter；aerosol；erro