摘要：综述了SiC/Si₃N₄ 复合粉体的力学性能和制备方法 ,提出了一种制备纳米级SiC/Si₃N₄ 复合粉体的新方法 ,并通过热力学分析提出了合成条件
关键词： 碳化硅(SiC);氮化硅(Si₃N₄);复合粉体;化学气相沉积工艺(CVD);热力学分析;

Abstract：T he mechanical properties and synthesis methods of silicon carbide and silicon nitride composite powders are re viewed．A new idea is put forward for the preparation of nano sized SiC／Si₃N₄ composite powders and a thermodynamic analy sis is made to predict the synthesis conditions．

Key words：silicon carbide；silicon nitride；composite powder； CVD process；thermodynamic analysis