摘 要：主要基于前期研究工作结果并参考了国内外相关 研究成果介绍和阐述了利用溶胶－凝胶技术制备的氧化 钼、氧化钛、钛酸锶陶瓷薄膜过程中控制薄膜稳定性的主要 工艺因素。特别对以无机盐为原料的溶胶－凝胶工艺（ISG 工艺）溶胶稳定性原理和措施做了较为详细描述和说明不同 出发原料、溶剂和络合剂相匹配性很重要。以钼酸铵为原 料乙二醇和水为溶剂柠檬酸为络合稳定剂溶胶在室温下 可稳定存放2年以上。干燥控制剂（DCCA）添加于溶胶中 可调整凝胶膜网络质点及其间孔隙的大小与分布减小热处 理过程中膜层应力和薄膜开裂。
关键词：溶胶－凝胶法；薄膜；纳米粒子；工艺控制
Abstract：On the basis of our previous research work and the achievement obtained in the field for ceramic thin films made by sol－gel technologythe major parameters to control the struc ture stability of thin films in the process of preparing molybde num oxidetitanium dioxidestrontium titanate by sol － gel method were reviewed．T he sol－gel process and the stability mechanism of the sol which was synthesized from inorganic saltwere also described to explain the importance of the match ing among the raw materialssolvent and the complex agent． T he sol prepared from ammoniumglycol and water solventand the complex stabilizer of citric acid could be steadily preserved at room temperature for over two years．T he addition of DCCA to the sol could adjust the network particles of gel filmsthe size and the distribution of the pores between the particles and re duce the crack formation caused by the stresswhich was in duced in the film layers during the heat-treated procedure．
Keywords：so-l gel method；thin film；nano-particle；process con trollin
