摘 要：用射频溅射法制备了金属／半导体 Fex（In2O3）1－x 颗 粒膜。实验结果表明：纳米尺度的 Fe 颗粒比较均匀地分布在 非晶态母体 In2O3 中。退火可使 In2O3 晶化。该样品在室温 下表现出超顺磁驰豫符合 Langevin 方程。光学测量表明：嵌 Fe 的磁性颗粒膜其电子的带间跃迁由 In2O3 的直接跃迁变 为间接跃迁基本吸收边红移；随磁性增强局域态尾变宽带 隙变窄。
关键词：颗粒膜；磁性；光学性质
Abstract： Metal／semiconductor Fe x（In2O3）1－x granular films were prepared by the RF-sputtering．T he results show that the nanometer-sized Fe particles uniformly dispersed in the amor phous matrix In2O3．In room temperaturethe magnetic behav ior of the films shows super-paramagnetic relaxation and in good agreement with Langevin function．T he spectra analyses indicate that the indirect photon transitions of granular Fe x（In2O3）1－xfilms substitute for the direct photon transitions of In2O3film in the absorption process and the fundamental absorption edges be come flat．T he optical energy gap decreases with increasing magnetic moments in the films while the width of the tail of lo calized state increases．
Keywords：granular film；magnetism；optical property
