摘要：用烧结法生产喷涂氧化铝。实验采用水冷非转移式 等离子喷枪‚工作气体为 N₂、H₂‚其纯度99．9％。稳定相 α－Al₂O₃ 经等离子射流熔融、淬冷后‚转变为亚稳相 γ－ Al₂O₃ 及球化低钠氧化铝‚经试验确定‚Al₂O₃ 的相变历程如 下： α－ Al₂O₃等离子射流 熔 体 淬冷 γ－ Al₂O₃800℃ ε－ Al₂O₃1100℃ α－Al₂O₃ 

关键词：氧化铝粉体；等离子体；相变

Abstract：T he alumina for sputtering was produced with sinter ing process．T he water cooling non-transference type spray gun was used‚working gases were N₂‚H₂‚their purity was99．9％． After melted by the plasma jet and quenched‚the stabilizing phase of α－Al₂O₃ is transformed to sub-stabilizing phase γ－ Al₂O₃ and spherical low sodium alumina．The tests show that the procedure of the phase transformation is as following： α－Al₂O₃plasma jet melted body quenching γ－Al₂O₃800℃ ε－Al₂O₃1100℃ α－Al₂O₃.

Keywords：alumina powder；plasma；phase change