ISSN 1008-5548

CN 37-1316/TU

2002年8卷  第2期
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喷涂氧化铝粉体及其在等离子射流下的变化

Alumina Powder for Sputtering and It's Change in Plasma Jet

Doi:10.13732/j.issn.1008-5548.2002.02.004
作者:罗玉长

摘要:用烧结法生产喷涂氧化铝。实验采用水冷非转移式 等离子喷枪‚工作气体为 N2、H2‚其纯度99.9%。稳定相 α-Al2O3 经等离子射流熔融、淬冷后‚转变为亚稳相 γ- Al2O3 及球化低钠氧化铝‚经试验确定‚Al2O3 的相变历程如 下: α- Al2O3等离子射流 熔 体 淬冷 γ- Al2O3800℃ ε- Al2O31100℃ α-Al2O3 

关键词:氧化铝粉体;等离子体;相变

Abstract:T he alumina for sputtering was produced with sinter ing process.T he water cooling non-transference type spray gun was used‚working gases were N2‚H2‚their purity was99.9%. After melted by the plasma jet and quenched‚the stabilizing phase of α-Al2O3 is transformed to sub-stabilizing phase γ- Al2O3 and spherical low sodium alumina.The tests show that the procedure of the phase transformation is as following: α-Al2O3plasma jet melted body quenching γ-Al2O3800℃ ε-Al2O31100℃ α-Al2O3.

Keywords:alumina powder;plasma;phase change