摘要:用烧结法生产喷涂氧化铝。实验采用水冷非转移式 等离子喷枪工作气体为 N2、H2其纯度99.9%。稳定相 α-Al2O3 经等离子射流熔融、淬冷后转变为亚稳相 γ- Al2O3 及球化低钠氧化铝经试验确定Al2O3 的相变历程如 下: α- Al2O3等离子射流 熔 体 淬冷 γ- Al2O3800℃ ε- Al2O31100℃ α-Al2O3
关键词:氧化铝粉体;等离子体;相变
Abstract:T he alumina for sputtering was produced with sinter ing process.T he water cooling non-transference type spray gun was usedworking gases were N2H2their purity was99.9%. After melted by the plasma jet and quenchedthe stabilizing phase of α-Al2O3 is transformed to sub-stabilizing phase γ- Al2O3 and spherical low sodium alumina.The tests show that the procedure of the phase transformation is as following: α-Al2O3plasma jet melted body quenching γ-Al2O3800℃ ε-Al2O31100℃ α-Al2O3.
Keywords:alumina powder;plasma;phase change