摘要：通过粒度分析对日本和国内稀土抛光粉的粒度及其分布进行了比较 ,通过精密分级考察了抛光粉最大颗粒对抛光过程划痕的影响。研究发现 ,控制最大颗粒的粒径 ,可有效地消除抛光的划痕现象。

关键词： 稀土；抛光粉；粒度

Abstract：T he comparison is made for the size distributions of two CeO₂ polishing powders samples from Japan and our country．T he scratch in the polishing process is investigated and it is shown that the polishing scratch is mainly dependent on the coarse particles and can be eliminated by accurate classification． 

Keywords：rare earth；polishing powders；particle size