摘要：研究了激光诱导化学气相沉积法制备纳米氮化硅的工作原理,提出了减少游离硅的措施,利用双光束激发制备得到了超微的、非晶纳米氮化硅粉体。实验证明,纳米氮化硅粉体具有很多奇异物理性能和光谱特性。

关键词： 激光诱导化学气相沉积法；氮化硅；纳米粉体；红外吸收光谱；拉曼光谱

Abstract：T he general principles of LICVD（laser induced chemical vapor deposition）are investigated and the measures to reducing dissociated Si are put forward．By applying double beam optical stimulation the ultrafine and amorphous Si₃N₄ nano-powders which possesses many peculiar physical chrarcteristics as well as optical features are obtained． 

Keywords：laser induced chemical vapor deposition；silicon nitride；nano-powders；infrared absorption spectra；Raman spectra