摘要：对传统光阻式颗粒计数器的计数方法进行了改进 ,采用积分统计的方法进行颗粒计数 ,研究了信号阀值的选取 ,以及信号噪声和颗粒脉冲信号的重叠对粒度分布求解的影响。数值模拟表明 ,在整个粒经范围内 ,求解结果对噪声不敏感 ,颗粒信号重叠程度加大 ,粒度求解结果在测量范围的上限的偏差加大 ,但对于中部和下限的粒度重合程度非常好。

关键词： 光阻;积分式;粒度测试;数值模拟

Abstract：The traditional optical blockage particle size counter is improved．The selection of signal threshold and the effect of overlap of signal noise and pulse signals on calculating the particle size distribution are discussed．With the integral analysis method within the range of all particle size the instrument can resist more noises and its background can be easily subtracted．When the overlap of particle signals increases the deviation of the maximum limit of particle size is big but the middle size and the minimum limit of particle size coincide well with the actual particles． 

Keywords：optical blockage；integral method；particle size analysis； numerical simulastion