摘要：针对目前国内碳化硅微粉的生产均为半自动化控制,本文中对Insitec在线粒度监控系统的功能和应用领域进行介绍,并在线切割用碳化硅粉的生产过程用来对产品粒度进行监控。结果表明:中控系统能够根据Insitec反馈的测量信息对工艺参数自动进行调节,使粒度变化控制在设定范围之内,粒度变化趋势平稳,波动很小,产品质量得到保证。整个生产过程达到全自动化控制。

关键词： 碳化硅粉;线切割;在线粒度监控

Abstract： In view of all process of silicon carbide powder controlled by semi-automation， the functions and application domains of Insitec online particle size monitoring system were briefly introduced，which was applied to control the product's particle size distribution during the production of silicon carbide powders for linear cutting. It was shown that the control center could adjust the process parameters automatically according to the feedback information of Insitec， and ensure the particle size distribution changing in the set-point limit. The changing trends of particle size were smooth and the fluctuations of particle size were small， and the product quality was ensured. The whole plant realized automatic control. 

Keywords： silicon carbide powders； linear cutting； online particle size monitoring