摘要：利用 TiO₂ 胶体在石英玻璃表面沉积制备 TiO₂ 薄膜，用分光光度 计测量 TiO₂ 薄膜的吸光度，研究沉积时间、TiO₂ 胶体浓度、镀膜次数对 TiO₂ 薄膜的沉积吸附过程和等效膜厚的影响，讨论纳米 TiO₂ 沉积吸附 的类型。 结果表明，最大等效膜厚随着 TiO₂ 胶体浓度的增大而增加；最 佳镀膜次数与 TiO₂ 胶体浓度无关，随着沉积时间的延长而减少；用气 体吸附的 B.E.T. 和 Langmuir 吸附理论分析的纳米 TiO₂ 在石英玻璃上 的沉积过程与实验结果相符。 

关键词：纳米 TiO₂； 沉降法；薄膜；等效膜厚；沉积模型

Abstract： Nano-TiO₂ thin film was prepared by TiO₂ colloid on quartz glass surface by deposition method. The effect of TiO₂ colloid concentration， sedimentation time， and number of layers on the effective film thickness and sedimentation behavior was investigated. Deposition adsorption types of TiO₂ nano-particles were discussed. The results show that the maximum effective film thickness increases with the increase of TiO₂ colloid concentration. The optimum coating times have no concern with TiO₂ colloid concentration， which decrease with prolongate of sedimentation time. The sedimentation of TiO₂ nano-particles on quartz glass analyzed by the gas adsorption theory of B.E.T. and Langmuir isothermal adsorption conforms to experimental results. 

Keywords： TiO₂ nano-particle；sedimentation； thin film； effective film thickness； sedimentation model